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Nanofabrication formatIsbn:Softcover - 9783709116661 ehe in einem theoretischen Teil

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ehe in einem theoretischen Teil die Hydrotechnik im Römischen Reich erläutert wird

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Nanofabrication formatIsbn:Softcover - 9783709116661 ehe in einem theoretischen TeilIntended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of

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