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Electron Kinetics and Applications of Glow Discharges formatIsbn:Hardcover - 9780306458224 das Spezielle der jeweiligen LiteraturströmungThis book resulted from the NATO Advanced Research Workshop on Electron Kinetics and Applications of Glow Discharges, held in St. Petersburg, Russia, on May 19 23, 1997. Glow discharges have found widespread applications in many technological processes from the manufacture of semiconductors, to recent developments in na technology, to the traditional fields of gas lasers, and discharge lamps. Consequently, the interest in the physics of glow
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